Factors Affecting the Sensitivity of Cross‐Linked Positive Resists

Autor:	Masayoshi Suzuki, Yoshitake Ohnishi
Rok vydání:	1982
Předmět:	Materials science Resist Renewable Energy Sustainability and the Environment Materials Chemistry Electrochemistry Biophysics Sensitivity (control systems) Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Journal of The Electrochemical Society. 129:402-405
ISSN:	1945-7111 0013-4651
DOI:	10.1149/1.2123867
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0b5230c2d34725c3d85a1067d4ed0be4 https://doi.org/10.1149/1.2123867 Zobrazit plný text záznamu