| Popis: |
Many manufacturing processes such as sputtering, ion implantation, MBE and others, rely heavily on cryopumping, mainly because of the inherent advantages such as an especially clean vacuum, very high pumping speeds with respect to water vapour and process gike argon, hydrogen and others However, one of the most criticised disadvantages of cryopumping—the fairly long downtime required for regular regenaration of the cryopump especially in high throughput processes—has now been cut considerably by the introduction of a new cryopumping concept. Fast Intelligent Regeneration System Technology—FIRST—which has now been implemented in the COOLVAC FR combines the advantages offered by conventional cryopumping with the additional benefit of considerably reduced total downtime for regeneration from a couple of hours to one hour or less in the case of sputter processes, for example. As a result, yield is increased immediately and the overall quality of the process itself is also much improved. User-friendly control modules ensure reliable application of the new technology with minimal training requirements. |
