| Autor: |
Yurii P. Pershin, Dmitrii L. Voronov, Alexander V. Vinogradov, Oleg Penkov, V. V. Kondratenko, Eugeniy Zubaryev, Yurii A. Uspenskii, I. A. Artioukov, John F. Seely |
| Rok vydání: |
2001 |
| Předmět: |
|
| Zdroj: |
Soft X-Ray Lasers and Applications IV. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.450595 |
| Popis: |
Processes going on at elevated temperatures between Sc and Si layers in Sc/Si coatings are studied by X-ray scattering and cross-sectional transmission electron microscopy. It is shown that the W layers of 0.5-0.8 nm placed at Sc-Si interfaces form effective barriers preventing the penetration of Si into Sc. The effects of Si-Sc diffusion and W-barriers on the reflectivity of coatings are calculated in good agreement with experimental results. Presented measurements show that the Sc/W/Si/W multilayers with the period of 20.5 nm fabricated by dc-magnetron sputtering possess thermal stability up to 250 C and the normal incidence reflectivity of 24% at wavelengths about 40 nm. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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