| Autor: |
G. Audoit, L. Kwakman, G. Delpy, Pierre Bleuet |
| Rok vydání: |
2016 |
| Předmět: |
|
| Zdroj: |
International Symposium for Testing and Failure Analysis. |
| ISSN: |
0890-1740 |
| DOI: |
10.31399/asm.cp.istfa2016p0571 |
| Popis: |
Prior to x-ray tomography, cylindrically-shaped samples are obtained using an innovative milling strategy on a Plasma-FIB. The method presented consists of tuning the ion dose as a function of pixel coordinates along with optimization of the scan geometries, drastically reducing the preparation time and significantly improving the overall workflow efficiency. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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