Micro- and Nano-fabrication of Stimulus-responsive Polymer using Nanoimprint Lithography

Autor: Makiko Umezaki, Eiichi Tamiya, Yuzuru Takamura, Takahiro Kishimura, Yoshiyuki Yokoyama
Rok vydání: 2011
Předmět:
Zdroj: Journal of Photopolymer Science and Technology. 24:63-70
ISSN: 1349-6336
0914-9244
DOI: 10.2494/photopolymer.24.63
Popis: Three-dimensionally cross-linked poly(N-isopropylacrylamide) (PNIPAAm), a thermo-responsive polymer, undergoes large volume change through reversible shrinking and swelling in response to changes in temperature. In this study, we developed a thermoresponsible resist (Bio-resist) consisting of a thermally cross-linkable PNIPAAm, thus enabling micropatterning by thermal nanoimprinting. As a result, micropatterning of Bio-resist was possible at a scale of 90 nm to 10 μm. Further, when water was dropped onto the micropattern of Bio-resist, the micropattern shrank when the substrate temperature was high (36 °C), and the micropattern swelled when the substrate temperature was low (20 °C). By utilizing the pattern deformation, a functional microchip was demonstrated that arrays, captures and releases microparticles.
Databáze: OpenAIRE