Modification of the Seed in SNLC and Its Effect on the Electrical Properties of PZT Thin Films

Autor: Seung-Ki Joo, Jong-In Yun, Nam-Kyu Song
Rok vydání: 2004
Předmět:
Zdroj: Integrated Ferroelectrics. 66:97-105
ISSN: 1607-8489
1058-4587
Popis: It is well known that electrical properties of PZT thin films can be considerably improved through Selectively Nucleated Lateral Crystallization (SNLC) process. However, we found out that grain boundaries were formed inside the PZT seed and they extended into the laterally crystallized area. In this work, when the rosette boundary was placed to the edge of the seed periphery, we could increase the number of boundaries were formed during SNLC artificially. So, we studied the effect of these boundaries on the electrical properties of PZT thin films and discussed the origin of the boundary formation through observing the first stage of SNLC.
Databáze: OpenAIRE