THE DEVELOPMENT OF METHODS FOR STUDIES OF SEMICONDUCTOR MATERIALS AND DEVICE STRUCTURES FOR MICRO - AND NANOELECTRONICS
| Autor: | N. V. Vishnyakov, V. G. Litvinov, A. D. Maslov, A. V. Ermachikhin, N. M. Tolkach, V. V. Gudzev, Yu. V. Vorobyov, V. G. Mishustin, D. S. Kusakin, T. A. Kholomina |
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| Rok vydání: | 2017 |
| Předmět: | |
| Zdroj: | Vestnik of Ryazan State Radio Engineering University. 60:164-170 |
| ISSN: | 1995-4565 |
| DOI: | 10.21667/1995-4565-2017-60-2-164-170 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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