The effect of ozone concentration during atomic layer deposition on the properties of ZrO2 films for capacitor applications
| Autor: | Woochool Jang, Jaewan Chang, Heeyoung Jeon, Hyungtak Seo, Hyoseok Song, Changhee Shin, Seokyoon Shin, Joo Hyun Park, Younsoo Kim, Jae Hyoung Choi, Han-jin Lim, Hyeongtag Jeon |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Zirconium Ozone Materials science Band gap Inorganic chemistry Metals and Alloys Analytical chemistry chemistry.chemical_element 02 engineering and technology Surfaces and Interfaces 021001 nanoscience & nanotechnology 01 natural sciences Oxygen Surfaces Coatings and Films Electronic Optical and Magnetic Materials Atomic layer deposition chemistry.chemical_compound Crystallinity chemistry Phase (matter) 0103 physical sciences Materials Chemistry 0210 nano-technology Electronic band structure |
| Zdroj: | Thin Solid Films. 619:317-322 |
| ISSN: | 0040-6090 |
| Popis: | In this study, we report the effect of process conditions on the crystallinity and energy band structure of atomic layer deposition (ALD) ZrO2 films deposited, using tris(dimethylamino) cyclopentadienyl zirconium as a precursor and ozone as a reactant. ZrO2 films exhibited systematic changes in phase and energy band gap as a function of the ozone concentration. The crystal phase was transformed from the monoclinic phase to a tetragonal phase in the presence of higher ozone concentrations. In addition, spectroscopic ellipsometry measurements showed that the optical band gap and oxygen vacancy defects decreased with increasing ozone concentration. The valence band maximum also shifted closer to the Fermi energy level with increasing ozone concentration. The change in electronic structure driven by a high concentration of ozone led to reduced leakage current density and a high dielectric constant in the ZrO2-based metal-insulator-metal capacitors. These improvements were not observed for depositions performed using conventional ZrO2 ALD with oxygen and water reactants. |
| Databáze: | OpenAIRE |
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