Popis: |
Carbon films were prepared by DC magnetron sputtering at various argon pressures ranging from 1 to 30 mTorr. The film sputtered at the lowest pressure (1 mTorr) was fully amorphous, showing no evidence of the (0 0 2) Bragg diffraction peak, and a density of 1.9 ± 0.3 g/cc, indicating little, if any, porosity. The film sputtered at the highest pressure (30 mTorr) showed a weak and broad (0 0 2) Bragg peak and had a density of 1.35 ± 0.15 g/cc, indicating significant porosity. The low pressure sputtered films were almost pure carbon ( |