Autor:	Marjorie K. Balazs
Rok vydání:	1989
Předmět:	chemistry.chemical_compound Yield (engineering) Materials science chemistry Ultrapure water Analytical chemistry Particle Butyl butyrate Particle identification
Zdroj:	Particles in Gases and Liquids 1 ISBN: 9781461280859
DOI:	10.1007/978-1-4613-0793-8_2
Popis:	The refinements of particle counters have permitted particle counting down to a level of 0.3μm. Recent problems in IC processing, however, have made it apparent that those unseen particles in the sub-0.3μm sizes are causing catastrophic “yield busts”.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0a3e71873e39f6633012be135e8757e2 https://doi.org/10.1007/978-1-4613-0793-8_2 Zobrazit plný text záznamu