Design for manufacturing validation tool: fast and reliable conversion of SEM images to GDS images
| Autor: | D. Ducharme, Michael J. Trybendis, D. Ronning, Brent Boerger, M. Yu, B. Xing, B. Grenon, R. Selzer |
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| Rok vydání: | 2006 |
| Předmět: |
Engineering
business.industry Image quality Interface (computing) ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION Nanotechnology computer.file_format Automation Design for manufacturability Image conversion Software Computer vision Artificial intelligence Image file formats business Image resolution computer |
| Zdroj: | 22nd European Mask and Lithography Conference. |
| ISSN: | 0277-786X |
| DOI: | 10.1117/12.692747 |
| Popis: | The ability to convert high resolution images from a Scanning Electron Microscope (SEM) of a printed lithographic pattern to a GDS image file which can be input into modeling software (such as litho-simulation, etc.) for rigorous analysis is a powerful tool. Its use can be expanded through the simplication of the SEM2GDS conversion procedure by automation of the tasks. In this paper, we describe our SEM2GDS and SCAN INTERFACE UNIT, which automates both SEM image collection and SEM2GDS conversion. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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