| Autor: |
A. J. Lichtenberg, Michael A. Lieberman, M. C. Williamson, D. A. Carl |
| Rok vydání: |
1991 |
| Předmět: |
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| Zdroj: |
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 9:339 |
| ISSN: |
0734-211X |
| DOI: |
10.1116/1.585572 |
| Popis: |
To investigate the transition from the low density mode to the high density mode in an electron cyclotron resonance (ECR) discharge, a Langmuir probe and an E field probe were used to measure ion density and E field intensity as functions of axial position and power. The experiments were performed in argon at 0.13 Pa in a 7.9 cm diam cyclindrical source chamber propagating TE11 mode 2.45 GHz microwave power. Low mode was characterized by a standing wave throughout the plasma chamber and minimal power absorption. High mode exhibited nearly complete power absorption and no standing wave past the ECR zone. A sliding short (ss) was used to determine if the position of an E field null in the source chamber affected the transition between these two modes for various magnetic field configurations. The ss position had little effect on mode transition, relative power absorption or ion density when positioned downstream from a broad, large volume resonance zone (resonance near the mirror midplane). However, the pla... |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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