Fiber-laser crystallization of Si films for advanced displays via the spot-beam annealing method

Autor:	Ruobing Song, Jayoung Park, Nikita Lisenko, Bonan Shen, Alexander Killips, Adithya P. Nair, Joshua E. Schoenly, Manuel Leonardo, Roger Dowd, James S. Im
Rok vydání:	2022
Zdroj:	Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII.
DOI:	10.1117/12.2611946
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::09d4d9f65d90f2f16c683daf48b6288d https://doi.org/10.1117/12.2611946 Zobrazit plný text záznamu