Crosslinking and decomposition reactions of epoxide functionalized polynorbornene. Part I. FTIR and thermogravimetric analysis

Autor: Edmund Elce, Paul A. Kohl, W. Christopher McDougall, Yiqun Bai, Sue Ann Bidstrup Allen, Robert A. Shick, Punit Chiniwalla
Rok vydání: 2003
Předmět:
Zdroj: Journal of Applied Polymer Science. 89:568-577
ISSN: 1097-4628
0021-8995
DOI: 10.1002/app.12234
Popis: The miniaturization of microelectronic de- vices has created a demand for new low-dielectric-constant materials to be used as insulating layers between metal interconnects. In this study, a functionalized polynor- bornene consisting of a copolymer of decyl norbornene and epoxide norbornene has been investigated as a low-temper- ature curing dielectric. Polynorbornenes possess properties that are attractive for microelectronics packaging; however, films of these polymers must be crosslinked in order to obtain the solvent resistance and low solvent swelling nec- essary for multilayer applications. Crosslinking of these ma- terials was achieved by acid-catalyzed cationic crosslinking of epoxide side groups. The reactions that occurred during higher temperature curing of epoxy functionalized nor- bornene films were studied using Fourier transform infrared (FTIR) spectroscopy and thermogravimetric analysis. Epox- ide crosslinking and epoxide decomposition reactions were identified and studied as a function of temperature and time. © 2003 Wiley Periodicals, Inc. J Appl Polym Sci 89: 568 -577, 2003
Databáze: OpenAIRE