Study of LAAS Sensitivity Using Back Surface Electric Field

Autor:	Hidekazu Uchida, Keita Kosugi
Rok vydání:	2021
Předmět:	Surface (mathematics) Materials science Back surface field Optics business.industry Mechanical Engineering Electric field Sensitivity (control systems) Electrical and Electronic Engineering business
Zdroj:	IEEJ Transactions on Sensors and Micromachines. 141:14-20
ISSN:	1347-5525 1341-8939
DOI:	10.1541/ieejsmas.141.14
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::09c04734eeeeeb67adff897db7a42433 https://doi.org/10.1541/ieejsmas.141.14 Zobrazit plný text záznamu