Characteristics of hydrogen plasma treatment on Al2O3/CrxOy/AlmOn composite film via Al-ion-implantation and ultra-low partial pressure oxidation
| Autor: | Yunhan Ling, Zhaoxia Lu, Zhengjun Zhang, Jipeng Wang, Q.G. Zhou, Yan Luo |
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| Rok vydání: | 2020 |
| Předmět: |
Materials science
Hydrogen Scanning electron microscope Nucleation chemistry.chemical_element 02 engineering and technology Surfaces and Interfaces General Chemistry Partial pressure engineering.material 010402 general chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences 0104 chemical sciences Surfaces Coatings and Films Ion implantation Coating chemistry Chemical engineering Transmission electron microscopy Materials Chemistry engineering 0210 nano-technology Layer (electronics) |
| Zdroj: | Surface and Coatings Technology. 395:125917 |
| ISSN: | 0257-8972 |
| DOI: | 10.1016/j.surfcoat.2020.125917 |
| Popis: | In this paper, the preparation of Al2O3/CrxOy/AlmOn composite film and the stability of the composite film in a hydrogen plasma environment are studied. Al ions were implanted into the surface of pure chromium substrate, which was expected to induce the transformation of alumina into α-Al2O3 by using Cr2O3 formed under ultra-low oxygen partial pressure conditions as a template for crystal nucleation. This was to improve the hydrogen barrier properties of the film. The surface morphology evolution and phase composition of three different implanted doses (2 × 1017 ion/cm2, 3.5 × 1017 ion/cm2, and 5 × 1017 ion/cm2) were studied by scanning electron microscopy (SEM), atomic force microscopy (AFM), and the cross-sectional structure of the film was analyzed by transmission electron microscopy (TEM). The stability of the film in a hydrogen plasma environment was evaluated by electrochemical methods. The experimental results show that the composite coating is composed of a three-layer structure of Al2O3/CrxOy/AlmOn. The Al2O3 layer is mainly composed of γ-Al2O3 and a small amount of α-Al2O3. The CrxOy and AlmOn layers are partial metallic Cr or Al, and they contain a small amount of corresponding oxides. The composite coating shows high stability after hydrogen treatment. Electrochemical tests show that the composite film has good hydrogen permeation resistance. This research provides a new coating for potential hydrogen permeation barrier application. |
| Databáze: | OpenAIRE |
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