Design, simulation, fabrication and characterization of nano-scaled acceleration grids
| Autor: | M. R. Müller, C. Kontis, D. Dietz, K. T. Kallis, C. M. Zimmer, E. Subasi |
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| Rok vydání: | 2014 |
| Předmět: |
Materials science
Fabrication business.industry Mechanical engineering Particle accelerator Condensed Matter Physics Grid Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Acceleration Optics Hardware_GENERAL law Electrode Hardware_INTEGRATEDCIRCUITS Electrical measurements Electrical and Electronic Engineering business Realization (systems) Voltage |
| Zdroj: | Microelectronic Engineering. 121:118-121 |
| ISSN: | 0167-9317 |
| Popis: | This paper discusses the realization of a downscaled electron accelerator. It consists of a bottom electrode, an acceleration area in the deep sub @mm-regime and a front grid which is used as electron exit window. After the optimization of the front electrode layout, the basic manufacturing process steps are introduced. Finally electrical measurements of the achievable breakdown voltages are presented. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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