Point Defect Supersaturation During Zinc Diffusion into InP

Autor:	Wolfgang Jäger, A. Rucki, D. Wittorf, Knut Urban, Nicolaas Stolwijk, Helmut Mehrer, H.-G. Hettwer
Rok vydání:	1995
Předmět:	Supersaturation Zinc diffusion Materials science Transmission electron microscopy Analytical chemistry Redistribution (chemistry) Electron microprobe Mass spectrometry
Zdroj:	MRS Proceedings. 378
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-378-183
Popis:	Formation of defects during Zn diffusion into undoped and Fe-doped InP single crystals at 700°C has been observed by transmission electron microscopy for various diffusion conditions. The observations are correlated with Zn concentration profiles obtained by electron microprobe measurements and secondary-ion mass spectrometry. The results allow the conclusion that indiffusing interstitial Zn can occupy In sublattice sites via a kick-out reaction. Under appropriate diffusion conditions supersaturations of In self-interstitial atoms result leading to defect formation. Observations in Fe-doped InP suggest that Zn also replaces Fe on In sublattice sites leading to redistribution and to precipitation of Fe.
Databáze:	OpenAIRE
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