Low temperature growth of Cu thin films on TiN(001) templates: Structure and energetics
Autor: | Bala R. Ramachandran, Wen J. Meng, Abu Shama Mohammad Miraz, Xiaomen Zhang, Shuai Shao, Collin D. Wick |
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Rok vydání: | 2020 |
Předmět: |
010302 applied physics
Materials science chemistry.chemical_element 02 engineering and technology Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Metal chemistry Chemical engineering visual_art 0103 physical sciences Cavity magnetron visual_art.visual_art_medium General Materials Science Ceramic Thin film 0210 nano-technology Crystal twinning Tin Single crystal |
Zdroj: | Materialia. 12:100748 |
ISSN: | 2589-1529 |
DOI: | 10.1016/j.mtla.2020.100748 |
Popis: | Synthesis of metal/ceramic interfaces with well-defined structural characteristics is an important step toward understanding the energetics and mechanical response of such interfaces. We used ultra-high-vacuum magnetron sputter deposition to grow elemental Cu thin films onto single crystal TiN(001) thin film templates, grown hetero-epitaxially onto single crystal MgO(001) substrates. Structure of the Cu thin films grown on TiN(001) templates was examined as a function of the growth temperature. At close to room temperature, we observed the previously reported cube-on-cube orientation relationship between Cu and TiN, with Cu(001)//TiN(001). At a slightly elevated temperature, we observed a new Cu-TiN orientation relationship with Cu(110)//TiN(001) that, to the best of our knowledge, is reported here for the first time. Accompanying molecular dynamics simulations with modified embedded atom method potentials newly developed for the Cu-TiN system showed the influence of nanoscale twinning and lattice strain on structure and interfacial energetics of Cu/TiN bicrystals. Controlled growth of metal/ceramic bicrystal thin films offers an opportunity for systematic testing of the mechanical response of metal/ceramic interfaces with better defined structural characteristics. |
Databáze: | OpenAIRE |
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