Autor:	Akshit Patel, Trevor Junquera, Kun Yu, Sridhar Kuchibhatla, Nirmal Sundaramoorthy, Harith Sethupathi, Samuel Marble, Casey Biederman, Brett Yatzor, Brian O'Hara, Justin Clements, Chris Torcedo, Marc Berardi, Elizabeth Sunkel, Daniel Costello, Tyler Reynolds, Michael Hatzistergos, Vincent Sih, Bradley Morgenfield, Olugbenga Famodu
Rok vydání:	2023
Zdroj:	2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::090c11c3d9ea4b58b790526b9fd6396c https://doi.org/10.1109/asmc57536.2023.10121068 Zobrazit plný text záznamu