3D Atom Probe Microscopy Sample Preparation by Using L-Shape FIB-SEM-Ar Triple Beam

Autor:	Hiroyuki Suzuki, Atsushi Uemoto, Hidekazu Susuki, Xin Man, Toshiaki Fujii, Masakatsu Hasuda, Tatsuya Asahata
Rok vydání:	2014
Předmět:	Materials science law Analytical chemistry Sample preparation Atom probe Scanning capacitance microscopy Instrumentation Beam (structure) law.invention
Zdroj:	Microscopy and Microanalysis. 20:354-355
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927614003493
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::08faa7787f5eb88755b855e288043ab4 https://doi.org/10.1017/s1431927614003493 Zobrazit plný text záznamu