| Autor: |
Philip X.-L. Feng, Charles N. Arutt, Christian A. Zorman, Michael W. McCurdy, Michael L. Alles, Hao Jia, Hailong Chen, Vida Pashaei, Robert A. Reed, RonaldD. Schrimpf, Wenjun Liao |
| Rok vydání: |
2017 |
| Předmět: |
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| Zdroj: |
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). |
| DOI: |
10.1109/transducers.2017.7994217 |
| Popis: |
We report on measuring radiation effects of energetic oxygen ions on silicon carbide (SiC) diaphragm resonators. Micromachined SiC diaphragms (1 mm × 1 mm × 2μm) vibrating at ∼200–800 kHz on multimode resonances are exposed to 14.3 MeV oxygen ions to sensitively probe the radiation effects of high-energy ions. We have observed frequency redshifts as large as ∼2.6%, as well as quality (Q) factor degradation in the multimode resonances of the SiC diaphragm. Non-ionizing energy loss (NIEL) damages appear to play a dominant role for such changes, with an equivalent NIEL dose of ∼7.3×1010/cm2, a value simulated from the stopping and range of ions in matter (SRIM). |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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