Growth Feature of Cubic Boron Nitride on c-BN Crystal Substrates

Autor:	SU Zuo-Peng, JI Xiao-Rui, Gong Xi-Liang, Yang Da-Peng, Yang Xu-Xin, DU Yong-Hui, Zhang Tie-Chen
Rok vydání:	2006
Předmět:	Materials science Scanning electron microscope Analytical chemistry General Physics and Astronomy Electron Sputter deposition law.invention Crystal chemistry.chemical_compound chemistry Boron nitride Feature (computer vision) law Crystallization Spectroscopy
Zdroj:	Chinese Physics Letters. 23:1324-1326
ISSN:	1741-3540 0256-307X
DOI:	10.1088/0256-307x/23/5/072
Popis:	Cubic boron nitride (c-BN) films were deposited on highly-oriented (111) bulk c-BN crystal by using the rf magnetron sputtering method. The growth films are characterized by micro-Raman spectroscopy (μ-RS) and scanning electron microscopy (SEM). The results show that the high crystallization electron transparent c-BN films in thickness of about 10 μm are obtained. Island and step growth models are clearly shown.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::08bd4bc0b91c5047c667f68fa940a791 https://doi.org/10.1088/0256-307x/23/5/072 Zobrazit plný text záznamu