The peculiarities of local laser oxidation of metal films

Autor: Andrey D. Kochetov, Vera A. Kochetova, Andrew M. Kulazhkin, Dmitrii A. Sinev, E. A. Shakhno
Rok vydání: 2013
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
Popis: Laser-applied thermochemical modification of thin metal films is the basement for perspective technology writing the submicron structures. Using the materials that are produce the transparent oxides layers during the heating should be perspective for to increase the resolution of this technology, but a detailed study about dependence of the oxidation process on the dynamics of the optical characteristics should be made at first. This article presents an attempt for to creation a new theoretical model, which allows showing in dynamics the process of metal film oxidation by laser pulses.
Databáze: OpenAIRE