Deposition of Al and Cu nanoparticles on Silicon Wafer using a Picosecond Nd:YAG Laser: An Experiment-based Parameter Optimization Guide
| Autor: | Veronika Glaw, M. Kossatz, K.-D. Lang, M. H. Azhdast, H. J. Eichler |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
business.industry Physics::Optics Nanoparticle 02 engineering and technology 021001 nanoscience & nanotechnology Laser 01 natural sciences law.invention 010309 optics X-ray laser law Picosecond Nd:YAG laser 0103 physical sciences Optoelectronics Deposition (phase transition) Wafer Physics::Atomic Physics Thin film 0210 nano-technology business |
| Zdroj: | Conference on Lasers and Electro-Optics. |
| DOI: | 10.1364/cleo_at.2017.jtu5a.12 |
| Popis: | The optimization of parameters for laser deposition of nanoparticles on Si-wafer is studied. The threshold of laser energy, pulses per laser shot and overlapping is crucial in order to achieve the best deposition results. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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