Effects of pulsed plasma on low temperature growth of Pb-based ferroelectric films in direct liquid injection metalorganic chemical vapor deposition

Autor:	Won-Jong Lee, Kyung-Mun Byun
Rok vydání:	2007
Předmět:	Perovskite chemistry.chemical_compound chemistry Analytical chemistry General Physics and Astronomy General Materials Science Plasma Metalorganic vapour phase epitaxy Chemical vapor deposition Lead titanate Lead zirconate titanate Ferroelectricity Stoichiometry
Zdroj:	Current Applied Physics. 7:113-117
ISSN:	1567-1739
DOI:	10.1016/j.cap.2006.02.003
Popis:	We have investigated the effects of pulsed plasma on the low temperature (380 °C) growth of Pb-based ferroelectric films using direct liquid injection metalorganic chemical vapor deposition (DLI-MOCVD). With an appropriately tuned pulsed plasma, stoichiometric lead titanate (PT) films having pure perovskite phases could be obtained over a wider range of metalorganic precursor input flow rate ratio. The processing window for the fabrication of stoichiometric lead zirconate titanate (PZT) films was also expanded with the assistance of the pulsed plasma. The step coverage characteristic was not degraded by the application of the pulsed plasma.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::087d9f5732b9fb2738a244c88efee0be https://doi.org/10.1016/j.cap.2006.02.003 Zobrazit plný text záznamu Full Text from ScienceDirect