Temperature distribution above a heated surface in a CVD reactor with hydrocarbon-containing gaseous mixtures
| Autor: | Valery V Smirnov, Sergey Y. Volkov, G. Marowsky, D. N. Kozlov |
|---|---|
| Rok vydání: | 2000 |
| Předmět: |
chemistry.chemical_classification
Surface (mathematics) Materials science Physics and Astronomy (miscellaneous) Condensation General Engineering Nucleation Analytical chemistry General Physics and Astronomy chemistry.chemical_element symbols.namesake Hydrocarbon chemistry symbols Physical chemistry Deposition (phase transition) Raman spectroscopy Carbon Pyrolysis |
| Zdroj: | Applied Physics B: Lasers and Optics. 70:123-126 |
| ISSN: | 1432-0649 0946-2171 |
| Popis: | Pyrolysis of C2H2 and CH4 gases near a heated surface was investigated using coherent anti-Stokes Raman spectroscopy (CARS). Gas temperature and hydrocarbon density spatial profiles above the surface of deposition were measured. Although the measured hydrocarbon density distribution above the surface showed a gradual decrease upon approaching the surface, the observed temperature distribution revealed the presence of a temperature maximum at distances of 300–600 μm from the surface. The appearance of this maximum is explained by the release of condensation energy in the region where intensive homogeneous nucleation of carbon clusters takes place. |
| Databáze: | OpenAIRE |
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