Alignment of the writing beam with the diffractive structure rotation axis in synthesis of diffractive optical elements in a polar coordinate system
| Autor: | Victor P. Korolkov, Vadim V. Cherkashin, R. V. Shimanskii, Alexander G. Poleshchuk |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Physics business.industry Structure (category theory) Physics::Optics Condensed Matter Physics Rotation Laser 01 natural sciences law.invention 010309 optics Optics Position (vector) law 0103 physical sciences Electrical and Electronic Engineering Polar coordinate system Photonics business Instrumentation Laser beams Beam (structure) |
| Zdroj: | Optoelectronics, Instrumentation and Data Processing. 53:123-130 |
| ISSN: | 1934-7944 8756-6990 |
| DOI: | 10.3103/s8756699017020030 |
| Popis: | A method is developed to ensure precise alignment of the origin of a polar coordinate system in which the laser beam position is defined in writing diffractive optical elements with the optical workpiece rotation axis. This method is used to improve the accuracy of a circular laser writing system in writing large-scale diffractive optical elements in a polar coordinate system. Results of studying new algorithms of detection and correction of positioning errors of the circular laser writing system in the course of writing are reported. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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