Study of ZrSiB Coatings Obtained by Magnetron Sputtering of ZrB2-20%Si and ZrB2-50%ZrSi2 Cathodes

Autor: F. V. Kiryukhantsev-Korneev, I. V. Yatsyuk
Rok vydání: 2019
Předmět:
Zdroj: Physics of Atomic Nuclei. 82:1437-1440
ISSN: 1562-692X
1063-7788
Popis: A comparative study of ZrSiB coatings obtained by magnetron sputtering with the use of cathodes of different phase composition is carried out. The optimal compositions from the point of view of maximum heat resistance are revealed.
Databáze: OpenAIRE