Method for increasing duty cycle of photoresist grating by hot pressing and its application

Autor:	郑衍畅 Zheng Yan-chang, 付绍军 Fu Shao-jun, 徐向东 Xu Xiang-dong, 邱克强 Qiu Ke-qiang, 胡华奎 Hu Hua-kui, 王 海 Wang Hai
Rok vydání:	2019
Předmět:	Materials science business.industry Duty cycle Optoelectronics Grating Photoresist business Hot pressing Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optics and Precision Engineering. 27:94-100
ISSN:	1004-924X
DOI:	10.3788/ope.20192701.0094
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0861255cc0a651fcb796d96048c09a98 https://doi.org/10.3788/ope.20192701.0094 Zobrazit plný text záznamu