Synergistic Additive-Additive Interactions in the Copper Electroplating Process
| Autor: | Peter Broekmann, Alexandra Wirth, Marc Martin, Thomas Haag, Markus Hahn, Anja Wagner, Dieter Mayer, Qiang Huang, Brett Baker-O`Neal, Keith Kwietniak, James Kelly, Jeffrey Hedrick |
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| Rok vydání: | 2008 |
| Zdroj: | ECS Meeting Abstracts. :2503-2503 |
| ISSN: | 2151-2043 |
| DOI: | 10.1149/ma2008-02/38/2503 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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