Generation and accumulation of dislocations on the silicon surface under the action of pulse-periodic emission from a YAG: Nd laser

Autor:	A. Yu. Kremnev, Alexander F. Banishev, Vladimir S. Golubev
Rok vydání:	2001
Předmět:	Surface (mathematics) Materials science Physics and Astronomy (miscellaneous) Silicon business.industry chemistry.chemical_element Laser law.invention Pulse (physics) Optics chemistry law Optoelectronics business Power density
Zdroj:	Technical Physics. 46:962-967
ISSN:	1090-6525 1063-7842
DOI:	10.1134/1.1395116
Popis:	Solid-phase damage of the silicon surface due to the generation and accumulation of dislocations is studied. The dislocations are generated under the pulse-periodic action of a YAG: Nd laser. The number of laser pulses that causes surface damage vs. power density and pulse repetition period is derived. A mechanism responsible for the generation and accumulation of the dislocations at the surface is suggested.
Databáze:	OpenAIRE
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