A Study on Beam Configuration of MEMS Capacitive Accelerometers Fabricated using SOI-MEMS Technologies

Autor:	Liu Jiannan, Hideo Muro
Rok vydání:	2017
Předmět:	Materials science Mechanical Engineering 010401 analytical chemistry 02 engineering and technology Electrical and Electronic Engineering 021001 nanoscience & nanotechnology 0210 nano-technology 01 natural sciences 0104 chemical sciences
Zdroj:	IEEJ Transactions on Sensors and Micromachines. 137:247-251
ISSN:	1347-5525 1341-8939
DOI:	10.1541/ieejsmas.137.247
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::07b1da823d46a9f34aabcaf910a6a5a6 https://doi.org/10.1541/ieejsmas.137.247 Zobrazit plný text záznamu