Characterization of electron cyclotron resonance hydrogen plasmas

Autor:	C. A. Outten, J. C. Barbour, W. R. Wampler
Rok vydání:	1991
Předmět:	Electron density Hydrogen Analytical chemistry chemistry.chemical_element Surfaces and Interfaces Plasma Condensed Matter Physics Electron cyclotron resonance Surfaces Coatings and Films Ion symbols.namesake chemistry symbols Electron temperature Langmuir probe Plasma diagnostics Atomic physics
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 9:717-721
ISSN:	1520-8559 0734-2101
Popis:	Electron cyclotron resonance (ECR) plasmas yield low energy and high ion density plasmas. The characteristics downstream of an ECR hydrogen plasma were investigated as a function of microwave power and magnetic field. A fast‐injection Langmuir probe and a carbon resistance probe were used to determine plasma potential (Vp ), electron density (Ne ), electron temperature (Te ), ion energy (Ti), and ion fluence. Langmuir probe results showed that, at 17 cm downstream from the ECR chamber, the plasma characteristics are approximately constant across the center 7 cm of the plasma, for 50 W of absorbed power. These results gave Vp =30±5 eV, Ne =1×108 cm−3, and Te =10–13 eV. In good agreement with the Langmuir probe results, carbon resistance probes have shown that Ti≤50 eV. Also, based on hydrogen chemical sputtering of carbon, the hydrogen (ion and energetic neutrals) fluence rate was determined to be 1×1016 /cm2 s at a pressure of 1×10−4 Torr and for 50 W of absorbed power.
Databáze:	OpenAIRE
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