Sliding Mode Control of a 2D Torsional MEMS Micromirror with Sidewall Electrodes
| Autor: | Manu Pallapa, Weijie Sun, Hui Chen, Zhendong Sun, John T.W. Yeow |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Lyapunov function
Microelectromechanical systems Materials science Mechanical Engineering Tracking (particle physics) Sliding mode control Industrial and Manufacturing Engineering symbols.namesake Tilt (optics) Artificial Intelligence Control and Systems Engineering Control theory Electrode symbols Transient response |
| Zdroj: | International Journal of Intelligent Mechatronics and Robotics. 3:16-26 |
| ISSN: | 2156-1656 2156-1664 |
| Popis: | This paper presents a sliding mode control scheme to improve the positioning performance of a 2-Degree-of-freedom (DOF) torsional MEMS micromirror with sidewall electrodes. The stability of closed-loop system is proved by Lyapunov stability theorem under the existence of bounded parameter uncertainties and external disturbances. Furthermore, the performance of the closed-loop system is illustrated by experimental and simulation results which verify that the feasibility and effectiveness of the proposed scheme. The results demonstrated that the torsional MEMS micromirror with the proposed sliding mode controller has a good transient response and tracking performance. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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