A microfabricated neural probe with porous si-parylene hybrid structure to enable a reliable brain-machine interface

Autor: Tao Sun, Gavin S. Dawe, Beibei Han, Wei Mong Tsang, Alex Yuandong Gu, Srinivas Merugu, Woo-Tae Park, Ning Xue, Yunxiao Liu
Rok vydání: 2016
Předmět:
Zdroj: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).
DOI: 10.1109/memsys.2016.7421581
Popis: To establish a reliable brain-machine interface (BMI), we report for the first time, a multifunctional porous silicon (PSi)-parylene neural probe using a CMOS compatible fabrication process. The biodegradable PSi shank serves as a mechanical stiffener for insertion process, then dissolves to leave only the polymeric structure to reduce stiffness mismatch between implant and cortical tissue, thus attenuates tissue responses. Moreover, its porous structure can serve as drug reservoir. The healing of the insertion trauma can be enhanced by continuously releasing pre-loaded drugs with the PSi degradation. Hence, the neural probe enables a more reliable BMI.
Databáze: OpenAIRE