Properties of the ablation process for excimer laser ablation of Y1Ba2Cu3O7

Autor:	E. Potenziani, W. Robert Sinclair, A. Pinkas, W. T. Hill, R. A. Neifeld, B. P. Turner
Rok vydání:	1991
Předmět:	Materials science Physics::Instrumentation and Detectors medicine.medical_treatment Physics::Medical Physics Inorganic chemistry Analytical chemistry General Physics and Astronomy Crystal growth Laser Ablation Fluence Ion law.invention Volume (thermodynamics) law Ionization medicine Thin film
Zdroj:	Journal of Applied Physics. 69:1107-1109
ISSN:	1089-7550 0021-8979
Popis:	The process of excimer laser ablation has been studied while varying the laser fluence from 0.237 to 19.1 J/cm2. Ion time‐of‐flight, total charge, target etch depth per pulse, and etch volume per pulse have been measured. Results indicate a maximum ablation volume and minimum ionization fraction occur near 5 J/cm2. Several of the parameters measured vary rapidly in the 1–5 J/cm2 range. Variation in these parameters strongly influences the properties of films grown by this technique.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0712eb14a43a444e66d40d25bd1ba039 https://doi.org/10.1063/1.347380 Zobrazit plný text záznamu