Research on micro-cavity structure processing technology based on porous silicon

Autor:	Ya-Lin Wu, Jing Chen, Hai-Chao Yu, Yan Zhang, Hong Qi, Zhi-Yuan Liu, Ying-Qi Shang
Rok vydání:	2020
Předmět:	Materials science Silicon chemistry.chemical_element Statistical and Nonlinear Physics Condensed Matter Physics Microstructure Porous silicon 01 natural sciences Electrochemical corrosion chemistry 0103 physical sciences Composite material 010306 general physics Layer (electronics)
Zdroj:	Modern Physics Letters B. 34:2050319
ISSN:	1793-6640 0217-9849
DOI:	10.1142/s0217984920503194
Popis:	Aiming at the problem of heterogeneity of sealed cavity in silicon microstructure processing technology, the technology of preparing micro-cavity by using porous silicon sacrificial layer is proposed. The effect of current density on the preparation of porous silicon and the effect of porous silicon with different porosity on the formation of micro-cavity in the preparation process of porous silicon were studied. Different process parameters were selected for experiments and the prepared micro-cavities were tested and analyzed. According to the test results, the suitable electrochemical corrosion process parameters were selected to prepare porous silicon, and the micro-cavity was realized by changing the process parameters, which greatly increased the application fields of micro-sensors and micro-actuators.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0711b87e16984caff05a411db02dc877 https://doi.org/10.1142/s0217984920503194 Zobrazit plný text záznamu