Hybrid BEEQ tandem mass spectrometer for the study of ion/surface collision processes
| Autor: | R. K. Julian, R. G. Cooks, D. E. Riederer, Brian E. Winger, S. A. Lammert, S. R. Horning, H. ‐J. Laue |
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| Rok vydání: | 1992 |
| Předmět: | |
| Zdroj: | Review of Scientific Instruments. 63:5613-5625 |
| ISSN: | 1089-7623 0034-6748 |
| DOI: | 10.1063/1.1143391 |
| Popis: | A hybrid mass spectrometer consisting of a magnetic sector, two electric sectors, and a quadrupole mass filter (BEEQ) has been built for the study of polyatomic ion/surface collision phenomena over the energy range of a few electron volts to several keV. Primary ions are generated by electron ionization or by chemical ionization, and the first two sectors are used to deliver a monoenergetic beam of ions, of a selected mass‐to‐charge m/z ratio, to a decelerator which sets the desired collision energy. The target, which can be introduced into the system without breaking vacuum, is mounted on a goniometer and situated in an electrically shielded region in the center of a large scattering chamber which contains an electric sector and a quadrupole mass analyzer used for kinetic energy and mass measurements on the ejected ions. These analyzers rotate around the scattering center to allow selection of the scattering angle of ions leaving the surface.Ultimate pressures attainable in the main scattering chamber ar... |
| Databáze: | OpenAIRE |
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