Autor:	Karl Yee, Dean V. Wiberg, Ken J. Hayworth, Kirill Shcheglov, Sam Young Bae
Rok vydání:	2002
Předmět:	Microelectromechanical systems Measurement method Engineering Manufacturing process business.industry Gyroscope law.invention Surface micromachining Hardware_GENERAL law Frequency characteristic Electronic engineering Deep reactive-ion etching Systems design business
Zdroj:	Design, Test, Integration, and Packaging of MEMS/MOEMS 2002.
ISSN:	0277-786X
Popis:	This paper reports on JPL's on-going research into MEMS gyroscopes. This paper will describe the gyroscope's fabrication-methods, a new 8-electrode layout developed to improve performance, and performance statistics of a batch of six gyroscopes recently rate tested.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::06ead8c6ff79c9719fb3b7558c932905 https://doi.org/10.1117/12.462826 Zobrazit plný text záznamu