Theoretical and finite element analysis of dynamic deformation in resonating micromirrors
| Autor: | Russell Farrugia, Duncan Camilleri, Joseph Micallef, Owen Casha, Ivan Grech, Edward Gatt |
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| Rok vydání: | 2017 |
| Předmět: |
Diffraction
Engineering business.industry Physics::Optics 02 engineering and technology Bending of plates Structural engineering Gimbal Deformation (meteorology) 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Torsion spring Finite element method Electronic Optical and Magnetic Materials 010309 optics Hardware and Architecture Bending stiffness 0103 physical sciences Electrical and Electronic Engineering 0210 nano-technology business Raster scan |
| Zdroj: | Microsystem Technologies. 24:445-455 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | Dynamic deformation is one of the limiting factors in the design of high frequency resonating microscanners that are intended for high definition raster scanning display applications. Out-of-plane deformation resulting from high acceleration loads causes beam divergence, which will in turn reduce the optical resolution. This paper presents a detailed analysis on the mechanical design aspects contributing to dynamic deformation such as the micromirror layout and the micromirror-spring linkage design. The applicability of one-dimensional plate bending theory in evaluating micromirror deformation due to inertial loads is investigated using finite element analysis. Improved analytical dynamic deformation predictions, which take into consideration the two-dimensional mirror plate twist, will also be presented. A comparison among a number of layout designs was carried out with the aim of increasing micromirror bending stiffness in a direction parallel to the axis of rotation. Moreover, spring-linkage effects were also addressed and a significant improvement in dynamic deformation was achieved with the inclusion of a gimbal structure between the micromirror and the torsion springs. A parametric analysis was also carried out in order to optimise the gimbal frame design in order to comply with the Rayleigh diffraction limit criterion. |
| Databáze: | OpenAIRE |
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