Nanosecond-laser hyperdoping of intrinsic silicon to modify its electrical and optical properties

Autor:	G.Y. Dong, H.W. Yang, S.J. Zeng, Z.Q. Shi, Y.J. Ma, C. Wen, W.B. Yang
Rok vydání:	2023
Předmět:	Electrical and Electronic Engineering Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optics & Laser Technology. 164:109517
ISSN:	0030-3992
DOI:	10.1016/j.optlastec.2023.109517
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::06b93386ef34af841d478cf1beadab0f https://doi.org/10.1016/j.optlastec.2023.109517 Zobrazit plný text záznamu Full Text from ScienceDirect