Applications of model-based transparent surface films analysis using coherence-scanning interferometry
| Autor: | Martin F. Fay, Thomas Dresel |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Materials science
business.industry General Engineering Field of view 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Signal Atomic and Molecular Physics and Optics Metrology 010309 optics Interferometry Optics Surface metrology 0103 physical sciences Coherence scanning interferometry Calibration 0210 nano-technology business Refractive index |
| Zdroj: | Optical Engineering. 56:111709 |
| ISSN: | 0091-3286 |
| DOI: | 10.1117/1.oe.56.11.111709 |
| Popis: | Surface metrology must increasingly contend with submicron films, whose prevalence now extends to products well beyond semiconductor devices. For optical technologies such as coherence-scanning interferometry (CSI), transparent submicron films pose a dual challenge: film effects can distort the measured top surface topography map and metrology requirements may now include three-dimensional maps of film thickness. Yet CSI’s sensitivity also presents an opportunity: modeling film effects can extract surface and thickness information encoded in the distorted signal. Early model-based approaches entailed practical trade-offs between throughput and field of view and restricted the choice of objective magnification. However, more recent advances allow full-field surface films analysis using any objective, with sample-agnostic calibration and throughput comparable to film-free measurements. Beyond transparent films, model-based CSI provides correct topography for any combination of dissimilar materials with known visible-spectrum refractive indices. Results demonstrate single-nm self-consistency between topography and thickness maps. |
| Databáze: | OpenAIRE |
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