The cylindrical DC magnetron discharge: I. Particle-in-cell simulation

Autor:	T A van der Straaten, N F Cramer, Ian Falconer, B. W. James
Rok vydání:	1998
Předmět:	Acoustics and Ultrasonics Chemistry Analytical chemistry Charge (physics) Electron Condensed Matter Physics Space charge Surfaces Coatings and Films Electronic Optical and Magnetic Materials Magnetic field Ion Electric field Particle-in-cell Electric potential Atomic physics
Zdroj:	Journal of Physics D: Applied Physics. 31:177-190
ISSN:	1361-6463 0022-3727
DOI:	10.1088/0022-3727/31/2/004
Popis:	The radial structure of a low-pressure cylindrical post-cathode direct-current magnetron discharge is investigated using a one-dimensional, electrostatic particle-in-cell code, incorporating non-periodic boundary conditions and an external circuit. Electron and ion collisions with a background gas of argon are modelled using Monte Carlo techniques. The radial structure of the discharge is examined for a range of operating conditions. Profiles of the electric potential, electric field and space charge density are found to vary systematically with the pressure p and magnetic field strength B, in a way which corresponds to a transition from the usual positive space charge mode at low values of B/p to a higher impedance negative space charge mode at higher values of B/p. This is consistent with a continuous and considerable reduction in the ratio of the electron-to-ion classical cross-field transport coefficients with increasing B/p. Results of a fluid model also predict the transition to the negative space charge mode.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0678b14d62d0897570f304d451fadf81 https://doi.org/10.1088/0022-3727/31/2/004 Zobrazit plný text záznamu