Investigation of Thermoelectric Properties for Ge2Sb2Te5 Thin Films Obtained by Magnetron Sputtering
| Autor: | A. V. Babich, Irina A. Voloshchuk, Dmitriy Yu. Terekhov, Dmitriy V. Pepelyaev |
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| Rok vydání: | 2021 |
| Předmět: |
Materials science
Annealing (metallurgy) 020209 energy 02 engineering and technology Sputter deposition 021001 nanoscience & nanotechnology Thermoelectric materials Thermal conductivity Electrical resistivity and conductivity Seebeck coefficient Thermoelectric effect 0202 electrical engineering electronic engineering information engineering Thin film Composite material 0210 nano-technology |
| Zdroj: | 2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus). |
| DOI: | 10.1109/elconrus51938.2021.9396571 |
| Popis: | In this work, thermoelectric properties of Ge2Sb2Te5 thin films obtained by magnetron sputtering were investigated. Deposition was carried out at room temperature, the thickness of the films was 500 nm. The resistivity, Seebeck coefficient and thermal conductivity of thin films were measured. The resistivity of as-deposited layers was about 3500 Ohm·cm and dropped sharply after annealing at a temperature of 260°C for 30 minutes, which is due to the phase transition of the material. The Seebeck coefficient for the as-deposited films was about 1000 μV/K, and the thermal conductivity was 0.16 W/(m·K). It has been established that the highest power factor of 0.13 mW/(m·K2) have Ge2Sb2Te5 thin films heat treated at 260°C |
| Databáze: | OpenAIRE |
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