Surface Structure of Titanium Nitride Prepared by Ion Beam Irradiation and RF Sputtering Processes

Autor:	Akira Kasahara, Siegfried Hofmann, Kyung-youl Min, Kazuhiro Yoshihara, Ryuichi Shimizu
Rok vydání:	1997
Předmět:	Materials science Ion beam business.industry Condensed Matter Physics Titanium nitride Surfaces Coatings and Films chemistry.chemical_compound Ion beam irradiation chemistry Sputtering Optoelectronics Surface structure Electrical and Electronic Engineering business
Zdroj:	SHINKU. 40:313-316
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.40.313
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::05b3fc6de71a3f71586f4607dd6fd59f https://doi.org/10.3131/jvsj.40.313 Zobrazit plný text záznamu