Effects of RF plasma treatment on spray-pyrolyzed copper oxide films on silicon substrates
| Autor: | Magdaleno R. Vasquez, Melanie M. Martinez, Rozen Grace B. Madera |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Copper oxide Materials science Physics and Astronomy (miscellaneous) Silicon General Engineering General Physics and Astronomy chemistry.chemical_element Plasma treatment 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences chemistry.chemical_compound chemistry Chemical engineering 0103 physical sciences 0210 nano-technology Pyrolysis |
| Zdroj: | Japanese Journal of Applied Physics. 57:01AB05 |
| ISSN: | 1347-4065 0021-4922 |
| DOI: | 10.7567/jjap.57.01ab05 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|