Enabling on-device and target-free overlay measurement from CD-SEM contours

Autor:	Thibaut Bourguignon, Regis Bouyssou, Jonathan Pradelles, Sébastien Bérard-Bergery, Bertrand Le-Gratiet, Romain Bange, Nivea G. Schuch, Thiago Figueiro, Nicolas Possémé
Rok vydání:	2022
Zdroj:	Metrology, Inspection, and Process Control XXXVI.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0588a3a055310cb941841a5d7dca41a7 https://doi.org/10.1117/12.2613327 Zobrazit plný text záznamu