Study of epitaxial films of Ag, Pd and AgPd deposited by dc sputtering

Autor:	L. Binst, F. Bouillon, P. Delcambe, Paule Kons, M. Jardinier-Offergeld, François Reniers
Rok vydání:	1990
Předmět:	Glow discharge Materials science Reflection high-energy electron diffraction Metallurgy Analytical chemistry chemistry.chemical_element Substrate (electronics) Epitaxy Electron diffraction chemistry Sputtering Thin film Instrumentation Palladium
Zdroj:	Microscopy Microanalysis Microstructures. 1:189-197
ISSN:	1154-2799
DOI:	10.1051/mmm:0199000103018900
Popis:	The experimental conditions to condense epitaxial films of silver, palladium and silverpalladium alloys onto (100) air-cleaved MgO faces by glow discharge sputtering are related. The orientation (100)d//(100)s (where d indicates deposit and s substrate) is observed for the two last systems. The films are characterized by THEED, RHEED, SAD, TEM and AES. The bulk composition of the alloys is determined by ICP. The surface purity of the condensed films is examined and discussed.
Databáze:	OpenAIRE
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