Electrical and optical properties of (In1-xSnx)2O3(1+δ) films (0.03 ≤ x ≤ 0.40, δ ≈ 0.28) grown on Si substrates using co-sputtering of In2O3 and SnO2

Autor:	Jae Jun Lee, Dae Ho Jung, Hae-Jun Seok, Han-Ki Kim, Hosun Lee
Rok vydání:	2022
Předmět:	Process Chemistry and Technology Materials Chemistry Ceramics and Composites Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Ceramics International. 48:37132-37141
ISSN:	0272-8842
DOI:	10.1016/j.ceramint.2022.08.289
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::0576076676a6a529aab4203e36256ea0 https://doi.org/10.1016/j.ceramint.2022.08.289 Zobrazit plný text záznamu Full Text from ScienceDirect